E05411 - SEMI E54.11 - Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices StdPbc-0822 SEMI E4-0923 (technical revision)

SEMI E4-0923 (technical revision)

SEMI C44-1223 (technical revision)

SEMI E63-0298 (technical revision)

• Equipment and load port access mode switching

choked flow parameters

E05411 - SEMI E54.11 - Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices StdPbc-0822 SEMI E4-0923 (technical revision)NOTICE: This Document is no longer published with the SEMI E54 suite of Standards. It is published and sold separately. This Specification is part of a suite of Standards that specify the implementation of SEMI Standards for the Sensor Actuator Network. The specific purpose of this Specification is to describe a network independent application model comprised of device objects that are common to all endpoint devices (EPD) on a semiconductor equipment