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A00400 - SEMI A4 - Specification for the Automated Test Equipment Tester Event Messaging for Semiconductors (TEMS) Revision:SEMI A4-0821 - Current SEMI MF1810-1110 (Reapproved 1115)

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Description

SEMI MF1810-1110 (Reapproved 1115)

This Safety Guideline includes safety considerations in addition to those of safety standards for industrial robots

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A00400 - SEMI A4 - Specification for the Automated Test Equipment Tester Event Messaging for Semiconductors (TEMS) Revision:SEMI A4-0821 - Current SEMI MF1810-1110 (Reapproved 1115)NOTICE: The designation of SEMI A4 was updated during the 0821 publishing cycle to reflect the publication of SEMI A4. 1. 1 Purpose 1. 1 Semiconductor test operations involving automated test equipment (ATE) today are experiencing increasing use of data for real time data analysis and real time ATE input and control, to improve test yield, throughput, efficiency, and product quality. At the same time, test equipment and test operations around the

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