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This Document covers requirements for carbon tetrafluoride (CF4) used in the semiconductor industry
It has been replaced by SEMI F118
この文書は，シリコンの
This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31
restrictors
C06700 - SEMI C67 - Guide for Hafnium Amides StdPbc-1119 This Document covers requirements forThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www. semiviews. org and www. semi. org in March 2017; originally published August 2011. The purpose of this Document is to provide a guide for hafnium amides for which a need has been identified. The scope of this Document covers high purity
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