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SEMI C1- Guide for the Analysis of Liquid Chemicals
This Document provides a guide to the test method to evaluate filter elements used in UPW fluid streams
SEMI C28-0306 (technical revision)
The scope of this Document is a grade of sodium hydroxide pellets used in the semiconductor industry
41 — Standard for Oxygen (O2)
C00340 - SEMI C3.40 - Specification for Carbon Tetrafluoride (CF4), 99.997% Quality Revision:SEMI C3.40-1011 - Superseded SEMI C1- Guide for theThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www. semiviews. org and www. semi. org in February 2018; originally published in 1989; previously published October 2011. The purpose of this Document is to provide specification for carbon tetrafluoride (CF4) that is used in the semiconductor industry.
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