PV05500 - SEMI PV55 - Data Definition Specification for a Horizontal Communication Between Equipment for Photovoltaic Fabrication System StdPbc-0820 SEMI MF1527-1104 (technical revision)

SEMI MF1527-1104 (technical revision)

An equipment may implement both techniques

Where material contains other material (such as carriers containing wafers)

corresponding to particular means of transportation are chosen by the user according to existing standards (e

1  It is the intent of this Standard to provide radio frequency (RF) power-delivery system specifications for semiconductor processing equipment that leads to improved system and subsystem performance

PV05500 - SEMI PV55 - Data Definition Specification for a Horizontal Communication Between Equipment for Photovoltaic Fabrication System StdPbc-0820 SEMI MF1527-1104 (technical revision)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Specification is to define a standard description of data, to be exchanged on an interface for horizontal communication between adjacent PV equipment. XML and XML schemas are common and widely used