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This Guide also addresses the universal alignment mark where the outcome will be a feasible photo alignment standard
optical stylus
SEMI 3D17-1123 (technical revision)
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D02300 - SEMI D23 - Guide for Cost of Equipment Ownership (CEO) Calculation for FPD Equipment StdTpc-FPD Color Filters This Guide also addresses theThis guide was technically approved by the global Flat Panel Display Equipment Committee and is the direct responsibility of the Japanese Flat Panel Display Equipment Committee. Current edition approved by the Japanese Regional Standards Committee on June 1, 1999. Initially available on SEMI OnLine August 1999; to be published September 1999. The purpose of this document is to provide a standard, simple CEO calculation method for evaluating FPD
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