E13600 - SEMI E136 - 半導体処理装置の高周波（RF）電力供給システムで使用されるRF電源の出力を決定するためのテスト方法 Revision:SEMI E136-1104 (Reapproved 0512) - Superseded Definition of such changes is

Definition of such changes is the purpose of this Test Method

This Test Method is comparative in that the resistivity of an unknown specimen is determined by comparing its measured spreading resistance with that of calibration standards of known resistivity

- There is not a fixed minimum diameter for nominal 300 mm wafers

this Test Method is relatively insensitive to microscopic particles on the back surface of the wafer

This document establishes guidance for adapter plate design and installation

E13600 - SEMI E136 - 半導体処理装置の高周波（RF）電力供給システムで使用されるRF電源の出力を決定するためのテスト方法 Revision:SEMI E136-1104 (Reapproved 0512) - Superseded Definition of such changes isNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Metrics Global Technical Committee20111224global Audits and Reviews Subcommittee20125www. semiviews. org www. semi. org200411 : (RF) RFSEMI E113 RFDC (CVDPVD) Referenced SEMI Standards SEMI E113 Specification for Semiconductor