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本仕様では，周波数134
2-1109 (Reapproved 0416)
In FPD manufacturing
Silicon technology underlies the integrated circuit and device industry
Until an index of precision is determined based on an interlaboratory evaluation
P02800 - SEMI P28 - 集積回路製造用オーバーレイ計測テストパターン Revision:SEMI P28-96 (Reapproved 0707) - Inactive 本仕様では，周波数134NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI global Micropatterning Committee2007425global Audits and Reviews Subcommittee20076www. semi. org1996 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met.