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P04700 - SEMI P47 - ラインエッジラフネス(Line Edge Roughness)およびライン幅ラフネス(Line Width Roughness)測定の試験方法 Revision:SEMI P47-0307 - Superseded SEMI MF391 — Test Methods

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Description

SEMI MF391 — Test Methods for Minority Carrier Diffusion Length in Extrinsic Semiconductors by Measurement of Steady-State Surface Photovoltage

SEMI C54 — Specification and Guide for Oxygen

9に準拠した)オープンカセットを扱う。本スタンダードはそれらの種類ならびにキャリア容量(13枚と25枚の)をひとつのインタフェース規格によって規定する。

He is director of the Center for Advanced Microelectronics Manufacturing (CAMM)

SEMI MS4-1113 (technical revision)

P04700 - SEMI P47 - ラインエッジラフネス(Line Edge Roughness)およびライン幅ラフネス(Line Width Roughness)測定の試験方法 Revision:SEMI P47-0307 - Superseded SEMI MF391 — Test Methodsglobal Microlithography Committee20061121global Audits and Reviews Subcommittee20072www. semi. org20073CD ROM IC Referenced SEMI Standards SEMI P19 Specification for Metrology Pattern Cells for Integrated Circuit Manufacture SEMI P35 Terminology for Microlithography Metrology SEMI P36 Guideline of Magnification Reference for Critical Dimension Measurement Scanning Electron Microscopes

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