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This edition was approved for publication by the global Audits and Reviews Subcommittee on August 25
Research to find suitable replacements for the n+ and p+ polysilicon gate electrodes used in conventional CMOS is placing renewed emphasis on experimental determination of the effective gate electrode work function of candidate materials
to be published September 1999
SEMI M81 — Guide to Defects Found on Monocrystalline Silicon Carbide Substrates
This Standard establishes a Specific Equipment Model (SEM) for AMHS storage equipment (Stocker SEM)
M00600 - SEMI M6 - 太陽光電池用シリコンウェーハの仕様 StdPbc-0420 This edition was approved forglobal Silicon Wafer Committee2008829global Audits and Reviews Subcommittee200810www. semi. org200811CD ROM198120077 SEMI M6SEMI M6. 1SEMI M6. 2SEMI M6. 3SEMI M6. 4SEMI M6. 5 PV Referenced SEMI Standards SEMI M1 Specifications for Polished Monocrystalline Silicon Wafers SEMI M59 Terminology for Silicon Technology SEMI MF26 Test Methods for Determining the Orientation of a Semiconductive Single Crystal
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