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SEMI E121 — Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
or use in the field
As a guide to equipment suppliers on how to represent the external view of their equipment to the factory host
This Standard also provides a Guide for tiers of hydrochloric acid for which a need has been identified
1-1224 (technical revision)
C03700 - SEMI C37 - Specification for Phosphoric Etchants StdPbc-0515 SEMI E121 — Guide forThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2011. Available at www. semiviews. org and www. semi. org in June 2011; originally published in 1981; previously published July 2006. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been
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