E16300 - SEMI E163 - Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items Within Specially Designated Areas Revision:SEMI E163-0212 (Reapproved 1217) - Inactive This Guide is intended for

This Guide is intended for use in both establishing new Specifications within SEMI as well as verification of performance to SEMI Specifications

and 150 mm Plastic and Metal Wafer Carriers

SEMI 3D11-1214 (Reapproved 0420)

200 mm ウェーハサイズ（要求事項ではないが，過去の課題）についての関連情報をもいくつか含む。

person guided vehicle or overhead hoist vehicle)

E16300 - SEMI E163 - Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items Within Specially Designated Areas Revision:SEMI E163-0212 (Reapproved 1217) - Inactive This Guide is intended forThe purpose of this Document is to minimize the negative impact on productivity caused by static charge and electric fields in semiconductor manufacturing equipment and facilities. It is a Guide for establishing optimum electrostatic compatibility of the handling environment for reticles and other items that are extremely electrostatic sensitive (EES) to electrostatic charge, voltage, and electric field. This Guide is complementary to SEMI E78 and