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SEMI D63-0818 (technical revision)
SEMI D6-0211 (technical revision)
residue errors and vector plots for overlay performance assessment in 3D-IC middle end process quality control
35-92 (technical revision)
SEMI D6-1101 (technical revision)
D00900 - SEMI D9 - Terminology for FPD Substrates Revision:SEMI D9-0303 (Reapproved 0321) - Superseded SEMI D63-0818 (technical revision)1 Purpose 1. 1 This Standard provides terms and definitions of materials and defects within and on the surface of flat panel display (FPD) substrates and of dimensional, thermal, chemical, optical, and mechanical properties of FPD substrates. 2 Scope 2. 1 These terms and definitions are applicable to both front and back substrates used in FPD fabrication. NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues
US$ 816.78
US$ 2511.95