E09800 - SEMI E98 - Provisional Standard for the Object-Based Equipment Model (OBEM) StdTpc-Package Specifications Excessive thickness variations within a

Excessive thickness variations within a lot from wafer to wafer or within a wafer may negatively impact process yield and solar cell efficiency

or environmental tests of the minienvironment

本标准定义了背接触式光伏电池和组件的相关术语，包括其生产制造技术、材料、工艺、设备和测试等方面，使得该技术能有统一的术语。

動機付け

SEMI PV68-0815 (first published)

E09800 - SEMI E98 - Provisional Standard for the Object-Based Equipment Model (OBEM) StdTpc-Package Specifications Excessive thickness variations within aPurposes of the Object Based Equipment Model include the following: Define a standard model for interfacing to multi process equipment and other complex equipment. Define standard equipment components so that communications can "discuss" component related issues. Provide an equipment model that can be easily integrated with SEMI E81 CIM Framework systems by connecting an OBEM compliant equipment to a Machine object. The purpose of the Object Based