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本文書の目的は，トランス1，2ジクロロエチレンに対して要求が認められたグレードのガイドラインを示す。
This Guide is intended to promote interoperable application of XML in a variety of semiconductor manufacturing usage contexts
本ドキュメントはパイプラインを通して授受される窒素およびアルゴンガスにのみ適用される。シリンダ充填ガスまたは液体状のガスには適用されない。
3-0915 (first published)
This Specification defines metrics and calculations for measurement of equipment productivity
E13300 - SEMI E133 - Specification for Automated Process Control Systems Interface StdTpc-Chemical & Gas Testing 本文書の目的は，トランス1，2ジクロロエチレンに対して要求が認められたグレードのガイドラインを示す。In order to more efficiently facilitate the integration of process control systems (PCS) such as run to run (R2R) control, fault detection (FD), fault classification (FC), fault prediction (FP), statistical process control (SPC), etc. into current and future fabs, there is a need to define interfaces for PCS that enable them to interact effectively and share data (1) among themselves and (2) with the other interdependent factory systems (including
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