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SEMI D6 — Specification for Flat Panel Display (FPD) Mask Substrates
SEMI E5 — SEMI Equipment Communications Standard (SECS-II)
SEMI D31では，目視検査とCCDベースの計測器との比較において，FPDの欠陥および斑点を検出する方式を導出した。
Four aspects in evaluating filter performance are considered in this Guide:
装置のドメインへの外部エンティティ（例えば工場や会社）は，装置の情報セキュリティに関連している場合にのみ言及される。
E03900 - SEMI E39 - Specification for Object Services: Concepts, Behavior, and Services StdTpc-FPD Color Filters SEMI D6 — Specification forThe purpose of the Object Services Standard (OSS) is to provide general terminology, conventions, and notation for describing behavior and data in terms of objects and object attributes. In addition, it provides basic services for reading object attributes, setting their values, and for asking for an objects contents. This Standard is intended to be referenced by other Standards which define specific objects to reduce redundancy. The scope of this
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