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1 The scope of this Specification and Guide is two Grades and three Tiers of sulfuric acid used in the semiconductor industry
本仕様に記述されるマーキングシンボルは，
650 µm thick
originally published in 1990
OC（オリエンテーションコーナ）により識別していた情報に加え，基板ごとのID等の情報を加えることができる。
F02200 - SEMI F22 - Guide for Bulk and Specialty Gas Distribution Systems Revision:SEMI F22-1102 - Superseded 1 The scope of thisThis Standard was technically approved by the Facilities Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www. semiviews. org and www. semi. org in May 2018; originally published in 1997; previously published August 2012. This reference Document is intended to outline for the user the common systems configurations, components, and subcomponents of
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