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SEMI C88-0815 (replaced by SEMI F117)
The scope of this Document covers tiers of cyclohexanone which are used in the semiconductor industry
This Document also provides a guide for a grade of hexamethyldisilazane for which a need has been identified
1 Purpose
and Final Assemblies
3D01500 - SEMI 3D15 - Guide for Overlay Performance Assessment for 3DS-IC Process StdTpc-3DS-IC SEMI C88-0815 (replaced by SEMIThis Guide will assist the user in conducting the overlay performance assessment for the face to back (F2B) and face to face (F2F) wafer in 3DS IC process. A generic overlay performance assessment specification will be addressed in order to provide criteria and common baselines of the middle end process for related upstream and downstream manufacturers fabricating the 3DS IC products. This Guide will provide a generic optical measurement methodology